The wafer is a thin slice of semiconductor, which is widely used for the fabrication of integrated circuits and solar cell manufacturing. It needs to undergo many microfabrication processes, such as doping, ion implantation, etching, thin-film deposition of various materials, and photolithographic patterning. The process is so delicate that the yield rate becomes the crucial factor in semiconductor manufacturing. To avoid any minor defect or a trace of impurity seriously affect to the production, Axiomtek has proposed an overall motion and vision solution for the precise process of wafer manufacturing.
Our Solution
The customer was looking for a comprehensive vision solution to build its mask aligner for semiconductor lithography. Axiomtek has proposed its IMB500 ATX motherboard and AX92320 4-port GigE Vision frame grabber card for semiconductor lithography. After the IMB500 and AX92320 control the industrial manipulators to place the silicon wafer in the lithography zone, four industrial cameras will locate the wafer to a fixed point for the lithography process. Then, the production data will be sent to the RAID box. Since Axiomtek has a strong partnership with Basler, we can efficiently provide customers with overall solutions.
The IMB500 is an industrial ATX motherboard powered by the Intel® Core™, Pentium® and Celeron® processors in the LGA1151 socket with the Intel® Q170 chipset. Rich I/O interfaces include two RS-232/422/485 ports, four RS-232 ports, four USB 3.0 ports, and eight USB 2.0 ports. With the Window® operating system, it can steadily and perfectly perform and show great compatibility. The rugged IMB500 has one PCIe x16 slot, two PCIe x4 slots, four PCI slots, and one Mini-PCIe slot which support different motion cards for various axis control. To save the slot space, it is also compatible with flexible chassis for RAID box, optical disc drive, external remote power cable, etc. With the support of AX92320, a 4-port GigE vision frame grabber card with four independent GbE LANs for industrial cameras, this vision solution is built for high performance yet reliable machine vision application in smart manufacturing.
Why Axiomtek
The semiconductor industry operates 24/7 all year round. Once any downtime happened, the manufacturer will lose tens of millions of dollars. Therefore, the ideal semiconductor production equipment needs not only precision but also stability. Axiomtek provides a high-quality motion control platform that meets the expectation of real-time, steady and high-speed processes for semiconductor manufacturers.
- Highly Customization
Semiconductor equipment is full of details. The different process requires different specification of industrial system and integration with software.
- Efficient and Great Service
The technical support team provides on-site service and quick-response to clarify and solve the problem efficiently.
- Stable and High-Quality Products
The products are made in Taiwan and passed rigorous tests to ensure extended life and long-term support.
- Long Term Supply
The supply period is at least seven years, and the maintenance supply is more than ten years. The long product life circle also meets the needs of semiconductor equipment.